CMOS compatible wafer scale adhesive bonding for circuit transfer

van der Groen, SonjaSonjavan der GroenRosmeulen, MaartenMaartenRosmeulenJansen, PhilippePhilippeJansenBaert, KrisKrisBaertDeferm, LudoLudoDeferm2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2219CMOS compatible wafer scale adhesive bonding for circuit transferProceedings paper