Rottenberg, XavierXavierRottenbergEkkels, PhillipPhillipEkkelsBrebels, StevenStevenBrebelsWebers, TomasTomasWebersCzarnecki, PiotrPiotrCzarneckiMertens, RobertRobertMertensNauwelaers, BartBartNauwelaersPuers, BobBobPuersMarchand, LaurentLaurentMarchandDe Wolf, IngridIngridDe WolfDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162007-06https://imec-publications.be/handle/20.500.12860/12813Novel EFFA-based thin-film RF-MEMS technologyProceedings paper