Gallagher, EmilyEmilyGallagherVanpaemel, JohannesJohannesVanpaemelPollentier, IvanIvanPollentierZahedmanesh, HoumanHoumanZahedmaneshAdelmann, ChristophChristophAdelmannHuyghebaert, CedricCedricHuyghebaertJonckheere, RikRikJonckheereLee, Jae UkJae UkLee2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25283Proceedings paperhttp://euvlsymposium.lbl.gov/pdf/2015/Oral_Wednesday/Session10_Pellicle,%20Mask%20Cleaning%20and%20Thermal%20Expansion/S10.3_Gal