Jonckheere, RikRikJonckheereRonse, KurtKurtRonsePopa, OvidiuOvidiuPopaVan den hove, LucLucVan den hove2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/208Molybdenum Silicide Based Attenuated Phase-Shift MasksJournal article