Variability aware sub-wavelength lithography characterization for robust SRAM design

Dobrovolny, PetrPetrDobrovolnyMiranda Corbalan, MiguelMiguelMiranda CorbalanZuber, PaulPaulZuber2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18849Variability aware sub-wavelength lithography characterization for robust SRAM designProceedings paper