Ma, YuanshengYuanshengMaLei, JunjiangJunjiangLeiTorres, J. AndresJ. AndresTorresHong, LeLeHongWord, JamesJamesWordFenger, GermainGermainFengerTritchkov, AlexanderAlexanderTritchkovLippincott, GeorgeGeorgeLippincottGupta, RachitRachitGuptaLafferty, NealNealLaffertyHe, YuanYuanHeBekaert, JoostJoostBekaertVandenberghe, GeertGeertVandenberghe2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25588Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithographyProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210731