van Haren, RichardRichardvan HarenYildirim, OktayOktayYildirimMouraille, OrionOrionMouraillevan Dijk, LeonLeonvan DijkKumar, KaushikKaushikKumarFeurprier, YannickYannickFeurprierHermans, JanJanHermans2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36153Intra-field etch induced overlay penaltiesProceedings paperhttps://doi.org/10.1117/12.2552051