Enhanced B doping in CVD-grown GeSn:B using B $d-doping layers

Kohen, DavidDavidKohenVohra, AnuragAnuragVohraLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstBhargava, NupurNupurBhargavaMargetis, JoeJoeMargetisTolle, JohnJohnTolle2021-10-252021-10-252018-020022-0248https://imec-publications.be/handle/20.500.12860/31068Enhanced B doping in CVD-grown GeSn:B using B $d-doping layersJournal articlehttps://doi.org/10.1016/j.jcrysgro.2017.12.018