Cobalt pre-metallization clean and functional water rinse in BEOL interconnect

Kesters, ElsElsKestersLe, Quoc ToanQuoc ToanLevan der Veen, MarleenMarleenvan der VeenAkanishi, YuyaYuyaAkanishiHideaki, IinoIinoHideakiMizutani, AtsushiAtsushiMizutaniHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33268Cobalt pre-metallization clean and functional water rinse in BEOL interconnectMeeting abstract