Mertens, PaulPaulMertensLoewenstein, LeeLeeLoewensteinVos, RitaRitaVosDe Gendt, StefanStefanDe GendtBearda, TwanTwanBeardaHeyns, MarcMarcHeyns2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2763Wafer cleaning: a quantifiable process stepProceedings paper