Ohyama, HidenoriHidenoriOhyamaNaka, N.N.NakaTakakura, K.K.TakakuraTsunoda, I.I.TsunodaBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19504Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopyJournal article