Pore structure of modified cyclic silsesquioxane thin films made porous using a cyclodextrins-based porogen

Yim, Jin-HeongJin-HeongYimBaklanov, MikhaïlMikhaïlBaklanovGidley, D.W.D.W.GidleyPeng, HuagenHuagenPengJeong, Hyun-DamHyun-DamJeongPu, Lyong SunLyong SunPu2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9963Pore structure of modified cyclic silsesquioxane thin films made porous using a cyclodextrins-based porogenJournal article