First-principles study of oxygen and aluminum defects in $b-Si3N4: Compensation and charge trapping

Grillo, Maria ElenaMaria ElenaGrilloElliott, Simon D.Simon D.ElliottRodriguez, JesusJesusRodriguezAnez, RafaelRafaelAnezColl, David SantiagoDavid SantiagoCollSuhane, AmitAmitSuhaneBreuil, LaurentLaurentBreuilArreghini, AntonioAntonioArreghiniDegraeve, RobinRobinDegraeveShariq, AhmedAhmedShariqBeyer, VolkhardVolkhardBeyerCzernohorsky, MalteMalteCzernohorsky2021-10-222021-10-2220140927-0256https://imec-publications.be/handle/20.500.12860/23882First-principles study of oxygen and aluminum defects in $b-Si3N4: Compensation and charge trappingJournal articlehttp://www.sciencedirect.com/science/article/pii/S0927025613004631