Rosseel, ErikErikRosseelVandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseGoossens, JozefienJozefienGoossensMoussa, AlainAlainMoussaLin, RongRongLinPetersen, DirchDirchPetersenNielsen, PeterPeterNielsenHansen, OttoOttoHansenBennett, NickNickBennettCowern, NickNickCowern2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14391Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctionsProceedings paper