Murota, JunichiJunichiMurotaYamamoto, YuchiYuchiYamamotoCostina, IoanIoanCostinaTillack, BerndBerndTillackLe Thanh, VinVinLe ThanhLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-232021-10-232016-11https://imec-publications.be/handle/20.500.12860/27061Dopant segregation in Si and Ge CVD epitaxial growthMeeting abstract