Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips

Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseDe Wolf, PeterPeterDe WolfHellemans, L.L.HellemansSnauwaerts, JanJanSnauwaerts2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/418Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting TipsOral presentation