Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)N

Pokhrel, AnkitAnkitPokhrelGupta, AnshulAnshulGuptaKim, Min-SooMin-SooKimSoulie, Jean-PhilippeJean-PhilippeSoulieSarkar, Sujan KumarSujan KumarSarkarCanvel, YannYannCanvelRenaud, VincentVincentRenaudKenens, BartBartKenensHodges, BlakeBlakeHodgesJosephsen, TrentTrentJosephsenO'Neal, SabineSabineO'NealHerr, QuentinQuentinHerrHerr, AnnaAnnaHerrTokei, ZsoltZsoltTokei2024-05-072023-08-072024-05-0720232380-632XWOS:001027381700021https://imec-publications.be/handle/20.500.12860/42289Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)NProceedings paper10.1109/IITC/MAM57687.2023.10154725979-8-3503-1097-9WOS:001027381700021