Fourkas, John. T. T.John. T. T.FourkasGao, JinweiJinweiGaoHan, ZhengZhengHanLiu, HaitaoHaitaoLiuMarmiroli, BenedettaBenedettaMarmiroliNaughton, Michael. J. J.Michael. J. J.NaughtonPetersen, JohnJohnPetersenSun, YongYongSunPret, Alex VagilioAlex VagilioPretZheng, YuebingYuebingZheng2023-06-222023-06-202023-06-2220212673-3013WOS:000991395700001https://imec-publications.be/handle/20.500.12860/41971Grand Challenges in Nanofabrication: There Remains Plenty of Room at the BottomEditorial material10.3389/fnano.2021.700849WOS:000991395700001LITHOGRAPHY