Massive metrology of 2D logic patterns on BEOL EUVL

Das, SayantanSayantanDasKang, S.S.KangHalder, SandipSandipHalderMaruyama, K.K.MaruyamaLeray, PhilippePhilippeLerayYamazaki, Y.Y.Yamazaki2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34953Massive metrology of 2D logic patterns on BEOL EUVLProceedings paperhttps://doi.org/10.1117/12.2554543