Evaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitch

Vereecke, BartBartVereeckePantouvaki, MariannaMariannaPantouvakiBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokei2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18265Evaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitchOral presentation