Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes

Storm, WolfgangWolfgangStormVandervorst, WilfriedWilfriedVandervorstAlay, Josep LluisJosep LluisAlayMeuris, MarcMarcMeurisOpdebeeck, AnnAnnOpdebeeckHeyns, MarcMarcHeynsPolleunis, C.C.PolleunisBertrand, P.P.Bertrand2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/371Degradation of clean Si-surfaces due to storage in clean (?) wafer boxesProceedings paper