Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation

Okudur, Oguzhan OrkutOguzhan OrkutOkudurVanstreels, KrisKrisVanstreelsDe Wolf, IngridIngridDe WolfHangen, UdeUdeHangen2021-10-232021-10-2320160021-8979https://imec-publications.be/handle/20.500.12860/27090Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentationJournal articlehttp://scitation.aip.org/content/aip/journal/jap/119/2/10.1063/1.4939284