Croes, KristofKristofCroesDemuynck, StevenStevenDemuynckSiew, Yong KongYong KongSiewPantouvaki, MariannaMariannaPantouvakiWilson, ChrisChrisWilsonHeylen, NancyNancyHeylenBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokei2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/22186Full reliability study of advanced metallization options for 30 nm ½pitch interconnectsJournal article