Bekaert, JoostJoostBekaertDe Bisschop, PeterPeterDe BisschopBeral, ChristopheChristopheBeralHendrickx, EricEricHendrickxvan de Kerkhof, Mark A.Mark A.van de KerkhofBouten, SanderSanderBoutenKupers, MichielMichielKupersSchiffelers, GuidoGuidoSchiffelersVerduijn, ErikErikVerduijnBrunner, TimothyTimothyBrunner2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30227EUV vote-taking lithography: Crazy.... or not ?Proceedings paperhttps://doi.org/10.1117/12.2299509