Spampinato, ValentinaValentinaSpampinatoArmini, SilviaSilviaArminiFranquet, AlexisAlexisFranquetConard, ThierryThierryConardvan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-2720190169-4332https://imec-publications.be/handle/20.500.12860/34053Self-focusing SIMS: A metrology solution to area selective depositionJournal articlehttps://doi.org/10.1016/j.apsusc.2019.01.107