Improved depth information from routine analysis of the inelastic background of XPS and HAXPES spectra using optimized two- and three-parameter cross-sections

Zborowski, CharlotteCharlotteZborowskiTougaard, SvenSvenTougaard2023-01-192021-11-022023-01-1920220142-2421WOS:000701394900001https://imec-publications.be/handle/20.500.12860/37539Improved depth information from routine analysis of the inelastic background of XPS and HAXPES spectra using optimized two- and three-parameter cross-sectionsJournal article10.1002/sia.7020WOS:000701394900001ENERGY-LOSSQUANTIFICATIONAES