Wong, PatrickPatrickWongVangoidsenhoven, DizianaDizianaVangoidsenhovenMurdoch, GayleGayleMurdochMaenhoudt, MireilleMireilleMaenhoudtVerhaegen, StafStafVerhaegenWiaux, VincentVincentWiaux2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16559Towards 26nm hp: advances in litho-process-lithoProceedings paper