Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k materials

Lanckmans, FilipFilipLanckmansMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5430Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k materialsOral presentation