Controlled ALE-type recess of molybdenum for future logic and memory applications

Pacco, AntoineAntoinePaccoTeppei, NakanoNakanoTeppeiIwasaki, AkihisaAkihisaIwasakiIwahata, ShotaShotaIwahataAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2023-08-102023-06-202023-08-1020212380-632XWOS:000784773200023https://imec-publications.be/handle/20.500.12860/41856Controlled ALE-type recess of molybdenum for future logic and memory applicationsProceedings paper10.1109/IITC51362.2021.9537407978-1-7281-7632-1WOS:000784773200023MECHANISMKINETICSAMMONIA