On-wafer human metal model measurements for system-level ESD analysis on component level

Scholz, MirkoMirkoScholzLinten, DimitriDimitriLintenThijs, StevenStevenThijsGriffoni, AlessioAlessioGriffoniSawada, MasanoriMasanoriSawadaNakaei, TTNakaeiHasebe, TakumiTakumiHasebeLafonteese, DavidDavidLafonteeseVashchenko, VladislavVladislavVashchenkoVandersteen, GerdGerdVandersteenHopper, PeterPeterHopperMeneghesso, GaudenzioGaudenzioMeneghessoGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182009-10https://imec-publications.be/handle/20.500.12860/16175On-wafer human metal model measurements for system-level ESD analysis on component levelProceedings paper