Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study

Conard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstBrijs, BertBertBrijsMack, P.P.Mack2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10255Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined studyProceedings paper