Beggiato, MatteoMatteoBeggiatoCerbu, DorinDorinCerbuLoo, RogerRogerLooSun, W.W.SunMoussa, AlainAlainMoussaBast, G.G.BastFukaya, K.K.FukayaBeral, ChristopheChristopheBeralCharley, Anne-LaureAnne-LaureCharleyJanardan, N.N.JanardanCross, A.A.CrossLorusso, GianGianLorussoIsawa, M.M.IsawaBelmonte, AttilioAttilioBelmonteKar, Gouri SankarGouri SankarKarBogdanowicz, JanuszJanuszBogdanowicz2024-06-152024-06-152024978-1-5106-7216-10277-786XWOS:001224296200040https://imec-publications.be/handle/20.500.12860/44055Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applicationsProceedings paper10.1117/12.3011279978-1-5106-7217-8WOS:001224296200040THREADING DISLOCATIONSMISFIT