Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor

Mattelaer, FelixFelixMattelaerVereecken, PhilippePhilippeVereeckenDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernier2021-10-222021-10-2220150897-4756https://imec-publications.be/handle/20.500.12860/25629Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursorJournal articlehttp://pubs.acs.org/doi/abs/10.1021/acs.chemmater.5b00255