Lisoni, JuditJuditLisoniWafer, K.K.WaferJohnson, J.A.J.A.JohnsonVandevelde, BartBartVandeveldeBrongersma, SywertSywertBrongersmaGoux, LudovicLudovicGouxParaschiv, VasileVasileParaschivMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersCaputa, ConcettaConcettaCaputaZambrano, R.R.Zambrano2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9214Thermo-mechanical stability of 3-D SrBi2Ta2O9 ferroelectric capacitorsMeeting abstract