Giannatou, EvaEvaGiannatouConstantoudis, VassiliosVassiliosConstantoudisPapavieros, GeorgeGeorgePapavierosPapageorgiou, HarrisHarrisPapageorgiouRutigliani, VitoVitoRutiglianiLorusso, GianGianLorussoVan Roey, FriedaFriedaVan RoeyGogolides, EvangelosEvangelosGogolides2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33028Deep learning nanometrology of line edge roughnessProceedings paperhttps://doi.org/10.1117/12.2520941