In-line and non-destructive analysis of epitaxial Si1-x-yGexCy

Loo, RogerRogerLooDelhougne, RomainRomainDelhougneGeenen, LucLucGeenenBrijs, BertBertBrijsVandervorst, WilfriedWilfriedVandervorstMeunier-Beillard, PhilippePhilippeMeunier-BeillardKoumoto, T.T.Koumoto2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9222In-line and non-destructive analysis of epitaxial Si1-x-yGexCyJournal article