Tsormpatzoglou, A.A.TsormpatzoglouDimitriadis, C.C.DimitriadisMouis, M.M.MouisGhibaudo, G.G.GhibaudoCollaert, NadineNadineCollaert2021-10-182021-10-1820090038-1101https://imec-publications.be/handle/20.500.12860/16326Experimental characterization of the subthreshold leakage current in triple-gate FinFETsJournal article