Teugels, LieveLieveTeugelsHeylen, NancyNancyHeylenRidremont, RomainRomainRidremontvan der Veen, MarleenMarleenvan der VeenYamanaka, TatsuyaTatsuyaYamanakaYamada, YuuyaYuuyaYamadaNishimura, KouheiKouheiNishimuraBuch, XavierXavierBuchHiro, AkitoAkitoHiroVega Gonzalez, VictorVictorVega GonzalezStruyf, HerbertHerbertStruyf2021-10-272021-10-272019-09https://imec-publications.be/handle/20.500.12860/34113Ru CMP for advanced metallizationProceedings paper