Gielis, SvenSvenGielisPeys, NickNickPeysDewulf, D.D.DewulfPavlovic, N.N.PavlovicVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe GendtHardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20721Aqueous chemical solution deposition of LuFeO3 thin high-k filmsOral presentation