Rachidi, SanaSanaRachidiRamesh, SivaSivaRameshBreuil, LaurentLaurentBreuilTao, ZhengZhengTaoVerreck, DevinDevinVerreckDonadio, Gabriele LucaGabriele LucaDonadioArreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2024-04-102023-07-282024-04-1020232330-7978WOS:001013930200031https://imec-publications.be/handle/20.500.12860/42224Enabling 3D NAND Trench Cells for Scaled Flash MemoriesProceedings paper10.1109/IMW56887.2023.10145992978-1-6654-7459-7WOS:001013930200031