Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method

Bilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmansSharafutdinov, R.R.SharafutdinovKhmel, S.S.KhmelSchukin, V.V.SchukinSemenova, O.O.SemenovaFedina, L.L.Fedina2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7215Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD methodJournal article