Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuConard, ThierryThierryConardDe Witte, HildeHildeDe WitteVandervorst, WilfriedWilfriedVandervorstNakajima, K.K.NakajimaKimura, K.K.KimuraGenchev, I.I.GenchevBermaier, A.A.BermaierGoergens, L.L.GoergensNeumaier, P.P.NeumaierDollinger, G.G.DollingerDöbeli, M.M.Döbeli2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4150Characterization of ultra thin oxynitrides: a general approachJournal article