Jayachandran, SuseendranSuseendranJayachandranDelabie, AnneliesAnneliesDelabieMaggen, JensJensMaggenCaymax, MattyMattyCaymaxLoo, RogerRogerLooMeersschaut, JohanJohanMeersschautLenka, HaraHaraLenkaVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-10-222021-10-2220140040-6090https://imec-publications.be/handle/20.500.12860/24007Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlatticesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0040609013016908