De Simone, DaniloDaniloDe SimonePollentier, IvanIvanPollentierVandenberghe, GeertGeertVandenberghe2021-10-222021-10-2220150914-9244https://imec-publications.be/handle/20.500.12860/25155Metal-containing materials as turning point of EUV lithographyJournal articlehttps://www.jstage.jst.go.jp/article/photopolymer/28/4/28_507/_article