Ebiko, SodaiSodaiEbikoIacovo, SerenaSerenaIacovoChew, Soon AikSoon AikChewZhang, BoyaoBoyaoZhangUedono, AkiraAkiraUedonoInoue, FumihiroFumihiroInoue2025-08-052024-12-072025-08-052024979-8-3503-7599-20569-5503WOS:001260983500322https://imec-publications.be/handle/20.500.12860/44950Exploring Bonding Mechanism of SiCN for Hybrid BondingProceedings paper10.1109/ECTC51529.2024.00331979-8-3503-7598-5WOS:001260983500322