Tsvetanova, DianaDianaTsvetanovaVos, RitaRitaVosVanstreels, KrisKrisVanstreelsRadisic, DunjaDunjaRadisicSonnemans, RogerRogerSonnemansBerry, IvanIvanBerryWaldfried, CarloCarloWaldfriedMattson, DavidDavidMattsonDeLuca, JJDeLucaVereecke, GuyGuyVereeckeMertens, PaulPaulMertensParac-Vogt, TatjanaTatjanaParac-VogtHeyns, MarcMarcHeyns2021-10-202021-10-2020121662-9779https://imec-publications.be/handle/20.500.12860/21650Non-oxidizing solvent-based strip of ion implanted photoresistJournal article