L-shape spacer architecture for low cost, high performance CMOS

Augendre, EmmanuelEmmanuelAugendrePerello, CarlesCarlesPerelloVandamme, EwoutEwoutVandammePochet, SandrineSandrinePochetRooyackers, RitaRitaRooyackersBeckx, StephanStephanBeckxde Potter de ten Broeck, MurielMurielde Potter de ten BroeckLauwers, A.A.LauwersBadenes, GonçalGonçalBadenes2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5020L-shape spacer architecture for low cost, high performance CMOSProceedings paper