Low-k organic spin-on materials in a non-etchback interconnect strategy

Waeterloos, JoostJoostWaeterloosMeynen, HermanHermanMeynenCoenegrachts, BartBartCoenegrachtsGrillaert, JoostJoostGrillaertVan den hove, LucLucVan den hove2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1643Low-k organic spin-on materials in a non-etchback interconnect strategyProceedings paper