Probing doping conformality in FINFET structures using resistors

Vandervorst, WilfriedWilfriedVandervorstJurczak, GosiaGosiaJurczakEveraert, Jean-LucJean-LucEveraertPawlak, BartekBartekPawlakdel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua Borniquel2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13126Probing doping conformality in FINFET structures using resistorsProceedings paper