Van Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannClima, SergiuSergiuClimaPourtois, GeoffreyGeoffreyPourtoisConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetLehnen, PeerPeerLehnenMeersschaut, JohanJohanMeersschautMenou, NicolasNicolasMenouPopovici, Mihaela IoanaMihaela IoanaPopoviciRichard, OlivierOlivierRichardSchram, TomTomSchramWang, Xin PengXin PengWangHardy, AnAnHardyDewulf, DaanDaanDewulfvan Bael, M.K.M.K.van BaelBlomberg, T.T.BlombergPieereux, D.D.PieereuxSwerts, J.J.SwertsMaes, J.W.J.W.MaesWouters, DirkDirkWoutersDe Gendt, StefanStefanDe GendtKittl, JorgeJorgeKittl2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14637Alternative high-k dielectrics for semiconductor applicationsOral presentation